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7 mm）の輸送梱包についての仕様およびガイドを定める。
This Test Method applies to all types of in-line components used in gas delivery systems for precise delivery of gaseous species used in semiconductor manufacturing
The purpose of this Document is to provide specifications for silane (SiH4) that is used in the semiconductor industry
SEMI A1-1025 (technical revision)
orgで入手可能となる。初版は1993年発行。前版は2002年11月発行。
C00602 - SEMI C6.2 - パイプラインガスとして授受されるグレード20/0.02酸素に対するパーティクル仕様 StdPbc-0616 7 mm）の輸送梱包についての仕様およびガイドを定める。NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201111www. semiviews. org www. semi. org1993200211 NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by
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